反应溅射沉积 sputter deposition: 溅射淀积ion sputter deposition: 溅射蒸涂reactive sputter etching: 反应溅射刻蚀reactive sputter etching system: 反应性溅镀蚀刻系统reactive vapour deposition: 反应气相沉积下载手机词典可随时随地查词查翻译